Optical lithography requires high-power excimer lasers and complex stacks of precision-ground lens elements to project nanometre-scale patterns onto the surface of semiconductor wafers.

A semiconductor is a material or device ... The wavelengths of light that can etch those tiny patterns into a wafer get smaller, too, so higher-energy light is required to do the etching.

An EUV mask is a highly precise template used in the semiconductor manufacturing process to create intricate patterns on silicon wafers. It acts as a stencil, blocking certain areas of the wafer ...

Lam Research Corporation (Nasdaq: LRCX) today announced that Aether®, its innovative dry photoresist technology, has been ...